Description
Technical Specifications
- Measurement Range: 1×10⁻⁸ Torr to 760 Torr (multi-range)
- Gauge Compatibility: Pirani, thermocouple, capacitance manometer
- Accuracy: ±2% full scale (mid-range)
- Display: Digital LED (4-digit)
- Output Signals: 0–10 V DC, 4–20 mA DC, relay alarms
- Communication Interface: RS-232
- Power Supply: 24 V DC ±10%, 1.2 A
- Operating Temperature: 10 °C ~ +45 °C
- Protection Class: IP20
- Dimensions (L×W×H): 250 mm × 200 mm × 80 mm
- Weight: 3.5 kg
Structural Features
Compact benchtop/rack-mountable enclosure, front panel with digital display and control buttons, rear panel with gauge connectors and signal outputs, built-in signal amplification and calibration circuits.
Functional Characteristics
Precise measurement and display of vacuum pressure in semiconductor process chambers; supports multiple gauge types; provides analog output signals and relay alarms for pressure interlock control.
Working Principle
Receives low-level signals from vacuum gauges; the internal circuit amplifies, filters, and linearizes the signals; converts processed signals to digital for display; outputs analog signals and triggers alarms based on preset thresholds.
Material Composition
- Enclosure: Cold-rolled steel sheet with electrostatic coating
- Front Panel: Impact-resistant acrylic
- Internal Circuit: FR-4 PCB with precision components
- Connectors: Stainless steel with gold plating
Advantages & Highlights
Wide vacuum measurement range, multi-gauge compatibility, high accuracy, stable long-term calibration, compact design, easy integration with AMAT vacuum systems, reliable in cleanroom environments.
Applicable Industries
Semiconductor manufacturing (vacuum chambers, load locks), thin-film deposition, etching equipment, vacuum coating, aerospace, research laboratories.
Installation Requirements
- Mount on a flat surface or in a standard 19-inch rack.
- Connect vacuum gauges using appropriate cables.
- Connect analog output and alarm wiring to the control system.
- Keep the enclosure dry and free of dust.
Usage Notes
- Calibrate the controller annually using AMAT-approved standards.
- Use only AMAT-compatible vacuum gauges.
- Avoid exposing the controller to corrosive gases.
- Disconnect power before cleaning or maintenance.
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