Product Short Description
- Product Brief: General precision spare part for Applied Materials semiconductor production equipment, matched with wafer etching, deposition and other process equipment, to ensure the normal operation of semiconductor process tools.
- Technical Specifications: Dimensional accuracy: Micron-level precision machining; Surface treatment: Ultra-clean anti-particle treatment; Mechanical performance: Meet semiconductor equipment long-term cycle operation standard; Interface: AMAT standard general interface.
Description
- Functional Features: As a mechanical matching part inside semiconductor process equipment, realize positioning, connection, limit and auxiliary transmission functions; Maintain structural stability during equipment high-speed operation and vacuum environment switching.
- Performance Parameters: Operating environment: Vacuum, high-purity gas, normal temperature; Mechanical fatigue life: ≥ 100,000 working cycles; Surface particle level: Class 1 ultra-clean standard; Structural strength: No deformation under rated load.
- Material Composition: Main material: Aerospace-grade aluminum alloy + passivation treatment; Matching contact part: Hardened stainless steel; Surface coating: Non-pollution high-purity protective coating.
- Structural Characteristics: Integral precision machining forming; Standard positioning hole and connecting thread; Optimized stress relief structure; Small-sized compact matching structure.
- Working Principle: Cooperate with other components of semiconductor equipment through precise dimensional matching and mechanical connection, complete mechanical positioning and motion limit, and assist the equipment to complete each step of wafer processing actions stably.
- Advantages & Highlights: High dimensional consistency and interchangeability; Ultra-low particle shedding, no pollution to wafer process; Excellent mechanical fatigue resistance; Fully compatible with AMAT mainstream semiconductor equipment models.
- Applicable Industries: Semiconductor wafer fabrication, Integrated circuit manufacturing, Microchip packaging and testing, Advanced electronic component production.
- Model Series: AMAT 1080 Series Semiconductor Equipment General Spare Parts
- Installation Requirements: Assembly must be completed in Class 10 ultra-clean workshop; Use special non-dust assembly tools; Confirm positioning direction before installation; Control assembly torque strictly.
- Usage Notes: Store in sealed ultra-clean packaging before use; Prohibit contact with hand sweat, dust and corrosive substances; Regularly check surface wear and positioning accuracy; Replace in time when fatigue deformation occurs.
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