Description
- Output Voltage: 0–1000 V DC (adjustable)
- Output Current: 0–10 A DC (adjustable)
- Output Power: 40 kW (continuous)
- Stability: ±0.1% full scale (voltage/current)
- Ripple: ≤50 mVpp
- Operating Temperature: -20 °C ~ +60 °C
- Protection Class: IP20
- Cooling Method: Forced air cooling
- Dimensions (L×W×H): 482 mm × 550 mm × 177 mm
- Weight: 28 kg
Structural Features
Rack-mountable chassis, heavy-duty aluminum alloy frame, front panel with digital display and control buttons, rear terminal block for power/control wiring, built-in EMI filter and surge protection.
Functional Characteristics
Provides high-stability DC power for semiconductor process chambers; supports constant voltage (CV) and constant current (CC) modes; includes overvoltage, overcurrent, and overtemperature protection.
Working Principle
Converts 3-phase AC input to DC via a rectifier and IGBT-based buck converter; uses closed-loop feedback control to maintain precise output voltage/current under varying load conditions.
Material Composition
- Chassis: Cold-rolled steel sheet with electrostatic anti-corrosion coating
- Internal Heat Sink: High-purity aluminum alloy
- Power Components: Industrial-grade IGBT modules, high-voltage capacitors
- Control Board: FR-4 PCB with gold-plated contacts
Advantages & Highlights
Ultra-high output stability, low ripple noise, wide adjustment range, comprehensive protection mechanisms, compatibility with AMAT Endura/Producer platforms, long-term reliability in vacuum/cleanroom environments.
Applicable Industries
Semiconductor wafer manufacturing (PECVD, Etching), thin-film deposition equipment, vacuum process systems, high-power industrial heating, plasma processing.
Installation Requirements
- Install in a standard 19-inch industrial rack with vertical orientation.
- Reserve 150 mm clearance above/below for cooling airflow.
- Use shielded cables for power and control wiring.
- Ensure reliable grounding (ground resistance ≤ 4 Ω).
Usage Notes
- Operate only within the rated voltage/current range.
- Allow a 30-minute warm-up period before full-load operation.
- Keep internal fans and heat sinks clean to prevent overheating.
- Do not open the chassis while powered on.
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