Product Short Description
Product Name: ZMI-4104 VME Laser Interferometer Measurement Board
Product Introduction:
ZMI-4104 is a high-precision signal processing board for laser displacement interferometer, belonging to ZMI series metrology electronics, used to convert optical interference signals into digital position data for nanometer-level positioning measurement.
Description
The board receives optical signals from ZYGO laser interferometer, processes interference fringe signals, calculates real-time displacement value, and outputs position data to host system via VME bus. Built-in cyclic error compensation suppresses inherent nonlinear measurement error.
Technical Specifications:
- Form Factor: VME64x standard board
- Measurement Channels: 4 independent measurement axes per board
- Position Resolution: Down to 0.15 nm
- Maximum Measuring Speed: ±2.55 m/s
- Accuracy (σ) at maximum speed: 0.2 nm
- Compatible Laser Heads: ZYGO 7702, 7714, 7724 series
- Minimum Receiving Optical Power: 0.07 µW
- Data Update Rate: Up to 40 kHz
- Operating Temperature: 18 ℃ ~ 28 ℃ (strict temperature control required for metrology grade)
Function Features:
- Built-in cyclic error compensation function
- Modular expansion, up to 64 synchronous measurement axes by multiple boards
- Real-time high-speed displacement data output
- Supports double-pass interferometer measurement configuration
- Continuous signal quality monitoring
Material & Structure:
- Standard VME PCB circuit board with metal front panel
- Shielded signal processing circuit to resist external optical and electromagnetic interference
Application Scenarios:
Semiconductor lithography equipment, precision wafer stages, optical metrology platforms, aerospace precision positioning systems, ultra-precision processing equipment.
Installation Requirements:
Install inside sealed VME industrial chassis; Connect optical fiber cables in accordance with optical path specification; Control chassis temperature fluctuation within ±0.1 ℃; Use dedicated shielded VME backplane.
Usage Notes:
Avoid vibration and dust pollution on optical connectors; Prevent laser eye hazard from matched laser source; Regularly check optical signal power; Do not operate outside specified temperature range.
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