Model Series
ZYGO 4000 Series Laser Interferometers
Related models in the series include:
- ZYGO 4200 — Base dual-frequency interferometer
- ZYGO 4205 — Enhanced precision configuration with extended range optics
- ZYGO 4500 — Multi-axis simultaneous measurement system
- ZYGO 7500 — Ultra-high-stability reference interferometer
Technical Specifications
Functional Features
- Dual-frequency laser operation — generates two orthogonally polarized frequencies separated by approximately 1.5 MHz to 2.0 MHz, enabling direction-sensitive displacement measurement without ambiguity
- Picometer-level resolution — resolves displacements down to 0.001 nm through phase-counting electronics
- Quadrature A/B output signals — provides both direction and magnitude information for real-time position tracking
- Air refractive index compensation input — accepts external environmental sensor data (temperature, pressure, humidity, CO₂) for refractive index correction per Edlén equation
- Laser frequency stabilization — active frequency lock to an internal iodine absorption reference or Zeeman splitting reference, ensuring long-term drift below 0.1 ppm per hour
- NIST-traceable calibration — factory-calibrated against national metrology standards with certificate of calibration included
Material Composition
Structural Characteristics
- Optical layout: Heterodyne Michelson interferometer configuration with internal reference arm and external measurement arm
- Internal reference arm length: Fixed path, thermally isolated from external environment
- Measurement arm output: Single collimated beam exit aperture with integrated beam steering optics
- Vibration isolation: Internal optical bench mounted on passive elastomer dampers
- Thermal management: Active temperature control of laser tube and optical bench maintaining ±0.01°C stability
- Form factor: Benchtop instrument with integrated handle for laboratory transport
- Mounting provisions: Four threaded mounting holes (M6) on baseplate for optical table attachment
Working Principle
- The dual-frequency HeNe laser emits two orthogonal polarization modes at slightly different frequencies (f₁ and f₂), separated by the Zeeman splitting frequency of approximately 1.5 MHz to 2.0 MHz
- The beam is split by an internal polarizing beam splitter into a reference arm (fixed path) and a measurement arm (directed to the target retroreflector or mirror)
- The measurement beam reflects off the target and returns to the interferometer, where it recombines with the reference beam
- The recombined beam produces a beat frequency signal at the detector equal to the difference between f₁ and f₂, which is Doppler-shifted by the target’s velocity
- The phase change of the beat signal is counted electronically — each full 360° phase cycle corresponds to a displacement of λ/2 = 316.4 nm
- Sub-fringe interpolation electronics resolve displacement to 1 pm (0.001 nm) by measuring the fractional phase within each fringe
- The quadrature A/B signals encode both the integer fringe count and the fractional phase, providing unambiguous direction and magnitude
- Environmental compensation is applied in real time using measured air temperature, pressure, humidity, and CO₂ concentration to correct the effective wavelength via the Edlén equation
Performance Parameters
Advantages and Highlights
- Picometer resolution — the highest resolution available in a commercial laser interferometer, enabling sub-angstrom measurement capability
- Dual-frequency operation — inherently direction-sensitive, eliminating counting errors from vibration or air turbulence
- Zerodur optical bench — near-zero thermal expansion ensures measurement stability independent of ambient temperature fluctuations
- NIST-traceable calibration — every unit ships with a calibration certificate traceable to the National Institute of Standards and Technology (NIST)
- Environmental compensation ready — direct input for temperature, pressure, humidity, and CO₂ ensures accuracy in non-laboratory environments
- 20,000+ hour laser life — exceptional source longevity reduces total cost of ownership
- Compact benchtop form factor — fits on standard optical tables, no cleanroom required for operation
- Industry-standard output signals — quadrature A/B TTL signals compatible with all major CNC controllers, data acquisition systems, and motion controllers
Applicable Industries
Installation Requirements
- Install on a vibration-isolated optical table with surface flatness better than λ/10 (63 nm) over 300 mm
- Maintain ambient temperature within +18°C to +25°C for optimal performance
- Ensure no direct airflow across the measurement beam path (air currents cause refractive index variations)
- Mount using the four M6 threaded holes on the baseplate — do not clamp the optical housing directly
- Connect environmental sensors (temperature, pressure, humidity) to the DB-25 input for full accuracy
- Connect quadrature A/B outputs via 50 Ω terminated BNC cables to the target controller or counter
- Allow a minimum 15-minute warm-up period before taking measurements
- Perform a zero-path calibration after installation using the built-in alignment procedure
Usage Precautions
- Do not look directly into the laser beam — even at 0.5 mW, the HeNe laser at 632.8 nm is a Class 2 laser and direct eye exposure is hazardous
- Do not touch optical surfaces — finger oils and contamination degrade fringe contrast and measurement accuracy
- Do not operate outside the specified temperature range — thermal drift exceeds specification below +10°C or above +35°C
- Do not expose to strong magnetic fields — the Zeeman-stabilized laser frequency is sensitive to external magnetic fields exceeding 5 gauss
- Do not disconnect the environmental sensor input during measurement — uncorrected air refractive index introduces errors up to 1 ppm per °C
- Do not exceed maximum beam velocity of 5 m/s — fringe counting electronics lose lock above this speed
- Replace laser tube only with ZYGO-certified replacement — non-original tubes void calibration certificate
- Clean optical windows monthly using lens tissue and optical-grade isopropyl alcohol (≥99.9% purity)
- Store in a dry, dust-free environment when not in use — cover all optical apertures with protective caps
- Recalibrate annually or after any physical shock, transport, or laser tube replacement to maintain NIST traceability
Part Number Decoding
Document Reference
- Manufacturer: ZYGO Corporation, 450 Main Street, Middlefield, CT 06455, USA
- Parent Company: AMETEK, Inc., 1100 Cassatt Road, Berwyn, PA 19312, USA
- Calibration Standard: NIST SRM 2517 (HeNe Laser Wavelength Standard)
- Applicable Standards: ISO 10360, ISO 11553, ASME B89.4.22
- Software Compatibility: ZYGO MetroPro, ZYGO Mx Software, LabVIEW, MATLAB, all major CNC controllers via quadrature input
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