Description
- Construction: All-welded stainless steel sensor, no elastomer / O-ring
- Helium Leak Test Standard: ≤1×10⁻9 std cc/sec (SEMI F1)
- Internal Surface Finish: 5 Ra
- Assembly Environment: Class 100 clean room manufacturing and packaging
- Cycle Life: Up to millions of switching cycles
Function Features:
Zero leakage path design; compatible with high-purity and corrosive process media; high switching point precision; no organic material contamination risk for process gas.
Application Scenarios:
Semiconductor gas cabinets, gas distribution manifolds, etching & deposition equipment, ultra-high purity gas delivery systems.
Material Composition:
High-grade stainless steel sensor body, welded metal structure, internal precision mechanical switching components.
Structure Features:
Compact cylindrical structure; all-welded seamless structure; customized process connection fittings; no detachable sealing gaskets.
Working Principle:
Process medium pressure acts on stainless steel sensing diaphragm; mechanical displacement triggers internal switch contact to realize pressure threshold on/off signal output.
Installation Requirements:
Install with specified orientation; avoid excessive mechanical torque during fitting connection; maintain clean installation environment to prevent particle contamination.
Usage Notes:
Do not expose to particulate pollution; avoid rapid pressure shock; strictly follow medium compatibility requirements; do not perform welding operations after installation.
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