UE PRECISION E48W-H16K

Description

Technical Specifications

1. Pressure Measurement Core Parameters

• Pressure Type: Absolute Vacuum Pressure (zero reference sealed internal vacuum cavity)
• Model H16K Factory Fixed Setpoint Range: 10–150 Torr absolute vacuum
• Standard Trigger Point: 20 Torr absolute pressure ±5% full span tolerance
• Repeatability Accuracy: ±5 Torr + 2% of setpoint value
• Maximum Safe Working Pressure: 15 psig overpressure
• Burst Pressure: 40 psig rupture protection limit

2. Electrical Switch Parameters

• Switch Contact Form: Single SPDT hermetically sealed gold-plated contacts
• Contact Rating: 5 A @ 125 V AC; 3 A @ 24 V DC resistive load
• Switch Response Time: ≤60 ms pressure state change trigger delay
• Electrical Connection: Free flying lead wire output (1.5 m standard length)

3. Environmental & Media Compatibility

• Operating Ambient Temperature: -18°C to +55°C (0°F to 130°F)
• Media Temperature Limit: -20°C to +80°C
• Surface Roughness Media Contact Surface: 5 Ra ultra-smooth electropolish finish
• Protection Grade: IP54 sealed housing

4. Process Connection Standard

• Media Port: 1/4″ VCR single-end metal gasket face seal connection (metal-to-metal zero elastomer sealing)

Material Composition

• Media Contact Diaphragm & Body: 316L VIM-VAR vacuum melted stainless steel
• Optional Media Wetted Material Upgrade: Inconel 718 / Hastelloy C-276 for corrosive specialty gas
• Internal Reference Vacuum Cavity: Electron beam welded stainless steel sealed cavity
• Switch Spring Diaphragm: Negative bias beryllium copper Belleville spring disc
• Electrical Lead Wire Insulation: PTFE high-purity non-outgassing insulation
• Internal Contact Chamber: Hermetic welded metal housing with gold-plated switch contacts

Structural Features

• Full electron beam welded integrated structure, zero internal elastomer sealing components to eliminate process gas contamination risk
• Sealed internal absolute vacuum reference cavity, trigger point unaffected by atmospheric barometric pressure changes
• Negative bias Belleville spring diaphragm design, excellent anti-vibration and anti-shock performance, installation position independent of switch trigger accuracy
• 1/4″ VCR metal face seal port, ultra-high purity semiconductor process standard connection without rubber O-ring
• Factory pre-calibrated fixed setpoint, internal adjustment screw sealed and locked to prevent on-site tampering drift
• All wetted metal surface electropolished 5 Ra ultra-smooth finish to reduce gas particle adsorption and dead volume

Working Principle

1. Ultra-high purity process vacuum gas enters 1/4″ VCR port and acts on 316L stainless steel isolation diaphragm;
2. Diaphragm deformation compresses internal Belleville spring disc under absolute vacuum pressure difference between process media and sealed internal zero vacuum reference cavity;
3. When absolute vacuum pressure reaches factory fixed trigger setpoint, spring disc mechanical displacement closes/opens SPDT gold-plated switch contacts to output discrete digital alarm signal;
4. Fully welded metal isolation barrier separates process gas media from internal electrical switch assembly, zero cross-contamination risk between media and internal switch components.

Function Features

• Absolute vacuum measurement eliminates atmospheric pressure fluctuation interference on trigger threshold
• Metal-to-metal VCR sealing eliminates elastomer particle shedding for semiconductor high-purity gas processes
• Vibration-resistant spring disc structure maintains stable trigger point under production equipment continuous vibration
• Hermetic gold-plated switch contacts achieve minimum 5 million switching cycles without oxidation contact failure
• No internal adjustable components, locked factory calibration ensures long-term trigger point consistency
• Ultra-low internal dead volume reduces process gas retention and cross-contamination between production batches

Performance Advantages

1. Zero elastomer wetted components meet semiconductor, pharmaceutical ultra-high purity process contamination control requirements;
2. Sealed absolute reference cavity maintains ±2% setpoint repeatability regardless of altitude or weather barometric pressure changes;
3. Electron beam welded body eliminates gas leakage risk under high vacuum negative pressure operating conditions;
4. 5 Ra electropolished surface minimizes particle adsorption for cleanroom manufacturing environments;
5. Position-independent mounting, vertical, horizontal or inverted installation without trigger point shift;
6. Gold-plated hermetic switch contacts maintain stable low-resistance signal under low-current control circuit loads.

Applicable Industries

Semiconductor wafer fabrication vacuum gas pipelines, solar cell manufacturing ultra-high purity gas delivery systems, pharmaceutical sterile vacuum production lines, laboratory high-vacuum test equipment, aerospace component vacuum leak testing systems, biotech sterile vacuum process equipment.

Installation Requirements

1. 1/4″ VCR metal gasket must use factory supplied nickel alloy metal gasket, rubber O-ring gasket forbidden for high-purity gas service;
2. Mounting surface must be cleanroom Class 100 clean grade before sensor installation, avoid particle contamination on VCR sealing face;
3. Electrical lead wire routing avoid direct contact with process heating pipelines, maximum ambient temperature at wire routing point ≤55°C;
4. Mounting bracket must rigidly fix sensor body to eliminate equipment vibration transmission to diaphragm assembly;
5. VCR connection nut tightening torque strictly controlled at 2.8 N·m to prevent metal gasket deformation and vacuum leakage;
6. Sensor installed upstream of process filter to block solid particles contacting internal isolation diaphragm.

Usage Precautions

• Forbid media containing solid particulate impurities ≥5 μm; particles scratch electropolished diaphragm surface and cause permanent vacuum leakage;
• Process media temperature exceeding +80°C long-term operation accelerates internal spring metal fatigue and shifts trigger setpoint;
• Do not apply mechanical impact to sensor body; impact damages electron beam welded sealed vacuum reference cavity;
• Electrical lead wire cannot be exposed to organic solvent vapor; solvent erodes PTFE insulation and causes short circuit;
• On-site disassembly of welded body voids factory calibration certification and absolute vacuum reference integrity;
• Regular leak testing of VCR metal sealing joint every 6 months to maintain high-purity process gas tightness.