MKS 979B-01-0013

Description

Technical Specifications:

• Part Number: 979B-01-0013
• Pressure Range: 0 – 10 Torr absolute
• Output: 0–5 VDC (ratiometric to 10 VDC supply)
• Accuracy: ±0.15% of reading + 0.002 Torr
• Resolution: 0.0001 Torr
• Supply Voltage: 10 VDC ± 5%
• Operating Temperature: +5°C to +50°C (+41°F to +122°F)
• Process Connection: 1/4″ VCR female (front-facing)
• Wetted Material: 316L Stainless Steel, Nickel diaphragm
• Response Time: < 5 ms (90% step)
• Overpressure Rating: 100 Torr (non-destructive)
• Electrical Connection: 8-pin DIN connector
• Dimensions: 89 mm × 63 mm × 63 mm
• Weight: 0.35 kg (0.77 lb)

Functional Features:

• Capacitance diaphragm sensing with no oil or fill fluid
• Ratiometric 0–5 V output proportional to absolute pressure
• Zero-drift: < 0.01% FS per °C
• Continuous operation at full-scale pressure

Performance Parameters:

• Linearity: ±0.1% of full scale
• Hysteresis: ±0.05% of full scale
• Repeatability: ±0.05% of full scale
• Long-Term Drift: < 0.1% of full scale per year
• Output Impedance: < 100 Ω

Structural Features:

• All-metal housing: 303 Stainless Steel
• 1/4″ VCR process connection with nickel gasket seal
• DIN 8-pin electrical connector (weatherproof)
• Internal temperature compensation circuit

Working Principle:
A thin nickel diaphragm flexes in response to absolute pressure. The diaphragm forms one plate of a precision capacitor; the fixed electrode forms the other. The capacitance change is converted to a proportional DC voltage by the signal conditioning electronics. Since the reference side of the diaphragm is a hard vacuum, the measurement is inherently absolute.

Key Advantages:

• No fill fluid — eliminates contamination risk
• Superior accuracy (±0.15% RDG) in the 0–10 Torr range
• Fast response time (< 5 ms) for real-time process control
• Zero-drift compensation ensures stability over temperature

Applicable Industries: Semiconductor fabrication, vacuum coating, mass spectrometry, analytical instrumentation, R&D laboratories

Installation Requirements:

• Mount with process connection facing upward (gas inlet from top)
• Use 1/4″ VCR copper gasket for leak-tight seal
• Supply voltage: 10 VDC regulated, ripple < 10 mV
• Avoid vibration sources; mount with rubber isolator if necessary

Usage Notes:

• Do not expose to pressures exceeding 100 Torr
• Bake-out temperature must not exceed 150°C
• Recalibrate annually using NIST-traceable standard
• Do not disassemble — diaphragm is factory-sealed