Product Short Description
Product Name: LAM Research Semiconductor Process Component 810-801237-021
Model Series: LAM 810 Series Semiconductor Core Parts
Product Brief: Precision mechanical locking component for LAM wafer carrier, responsible for fixing and locking semiconductor wafer carrier in process station.
Description
- Locking Force: 120N rated locking force
- Unlock Response Time: ≤15ms
- Operating Temperature: 5°C ~ 68°C
- Cycle Frequency: 600 times/h maximum working frequency
Functional Features: Automatic locking, quick unlocking, anti-loosening, overload protection and position locking for wafer carrier.
Performance Parameters:
- Mechanical Cycle Life: 1,200,000 times locking/unlocking cycle
- Locking Repeat Error: ±0.012mm
- Anti-loosening Performance: No loosening under continuous vibration working state
Material Composition: Carburized and quenched alloy steel locking head, stainless steel spring component, engineering plastic wear-resistant sleeve, zinc alloy fixed base.
Structural Characteristics: Spring-driven automatic locking structure, wedge-shaped locking surface, built-in overload limit structure, split type easy-replacement design.
Working Principle: Complete locking action through spring elastic force and wedge surface occlusion; release locking state under external driving force; limit excessive displacement via internal limit structure to prevent equipment damage.
Advantages & Highlights: Large locking force, fast action response, durable mechanical structure, excellent anti-vibration and anti-loosening ability, convenient single-piece replacement.
Applicable Industries: Semiconductor wafer handling system, chip production automation line, semiconductor carrier matching accessories.
Installation Requirements: Install at reserved position of wafer carrier base; adjust locking stroke to standard range after installation; test locking and unlocking action for 50 cycles before formal operation.
Usage Notes: Regularly clean foreign matter on locking contact surface every 20 working days; do not apply excessive external force to forced unlocking; replace spring parts after 800,000 cycles.
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