Product Short Description
Product Name: LAM Research Semiconductor Process Component 810-234640-312
Model Series: LAM 810 Series Semiconductor Core Parts
Product Brief: Precision transmission and positioning component for LAM high-precision semiconductor processing equipment, matched with wafer transmission mechanism.
Description
- Transmission Stroke: Custom standard stroke for LAM 810 equipment
- Repeat Positioning Accuracy: ±0.008mm
- Operating Speed: Rated 0.3 m/s maximum operating speed
- Load Bearing: 2kg rated bearing capacity
Functional Features: Wafer automatic transmission, precise position adjustment, buffer deceleration and mechanical linkage; ensures stable transfer of wafers between process stations.
Performance Parameters:
- Continuous Operation Time: 24-hour uninterrupted operation supported
- Wear Resistance: Surface wear loss ≤0.001mm after 10,000 hours operation
- Noise Level: ≤55dB during rated operation
Material Composition: Hardened stainless steel transmission shaft, ceramic wear-resistant contact surface, PA66 reinforced plastic support frame, damping rubber buffer block.
Structural Characteristics: Multi-stage linkage transmission structure, built-in buffer mechanism, closed lubrication chamber, integrated limit protection structure.
Working Principle: Converts motor power into linear and reciprocating mechanical motion through internal transmission structure; completes wafer handling and positioning with buffer deceleration in place.
Advantages & Highlights: Ultra-high positioning accuracy, low operation noise, wear resistance, stable transmission, built-in buffer to avoid wafer damage, sealed lubrication for long service cycle.
Applicable Industries: Semiconductor fabrication, advanced chip manufacturing, semiconductor equipment original accessories and after-sales replacement.
Installation Requirements: Fixed on transmission base of LAM 810 equipment; align linkage interface accurately; fill designated lubricating grease according to standard; test idle operation for 10 minutes before formal use.
Usage Notes: Prohibit overloading beyond rated load; regularly check lubricant level every 45 working days; avoid foreign matter entering transmission gap; stop operation immediately if abnormal noise occurs.
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