LAM 810-066590-004

Description

• • Axes: 3 independent axes (X, Y, Z)
  • Step Resolution: 0.001 mm/step (microstepping)
  • Voltage: 24 VDC ±10%
  • Operating Temperature: -20 °C to +70 °C
• Functional Features:
  • Microstepping Control: 1/2, 1/4, 1/8, 1/16 microstep modes.
  • Position Feedback: Integrated optical encoder interface for closed-loop control.
  • Limit Switch Inputs: 3 pairs of optical limit switches for homing and overtravel protection.
  • Serial Communication: RS-232/RS-485 interface for host command communication.
• Performance Parameters:
  • Max Step Rate: 50,000 steps per second
  • Holding Torque: 1.2 N·m per axis
  • Positioning Accuracy: ±0.002 mm
• Material Composition:
  • PCB Material: FR-4, 1.6 mm thickness
  • Driver IC: High-current stepper motor drivers (4 A per phase)
  • Connectors: Gold-plated pin headers for motor and signal connections
• Structural Characteristics:
  • Compact Design: 220 mm × 180 mm × 20 mm
  • Edge-mounted: Fits in robot controller card slots
  • Heat Sink: Integrated aluminum heat sink for driver ICs
• Working Principle: Receives motion commands from the robot controller, generates step/direction signals for each axis, and monitors encoder feedback to ensure precise positioning.
• Advantages:
  • Ultra-precision Positioning: Critical for wafer alignment in lithography and etching processes.
  • Smooth Motion: Microstepping reduces vibration and noise.
  • High Integration: Combines 3-axis control on a single board, saving space.
• Applicable Industries: Semiconductor wafer fabrication, robotics, precision automation.
• Model Series: 810 Series (Lam Research Motion Control PCBA Series)
• Installation Requirements:
  • Mount in the robot’s control enclosure with adequate cooling.
  • Connect motor phases and encoders per the wiring diagram.
• Usage Notes:
  • Do not exceed the maximum motor current (4 A/phase).
  • Avoid running motors at stall conditions for extended periods.