Product Short Description
Product Name: Brooks Vacuum System Sensor Assembly
Product Series: Brooks Semiconductor & Vacuum Equipment Sensor Series
Product Brief Introduction: Specialized vacuum pressure sensor assembly for Brooks high-purity gas delivery and vacuum systems, widely used in semiconductor and precision vacuum equipment for pressure monitoring.
Description
- Measuring Range: 0 ~ 1000 Torr
- Output Signal: 4 ~ 20 mA standard analog signal
- Supply Voltage: 24 V DC
- Measurement Accuracy: ±0.15% FS
- Response Time: ≤ 10 ms
Functional Features: Real-time vacuum pressure detection; analog signal output; gas medium compatibility; pressure over-limit alarm trigger; temperature compensation function.
Performance Parameters:
- Operating Temperature: 10 °C ~ +60 °C
- Working Medium: High-purity inert gas, dry air
- Pressure Resistance: 1.5 times full scale pressure
- Repeatability: ≤ 0.05% FS
Material Composition: Corrosion-resistant stainless steel pressure sensing diaphragm; precision pressure sensing chip; hermetically sealed metal shell; PTFE sealing ring; stainless steel connecting thread.
Structural Features: Integrated compact assembly; threaded process connection port; electrical signal terminal on the side; fully sealed internal structure; anti-vibration integral design.
Working Principle: The internal pressure sensing diaphragm deforms under gas pressure, the sensing chip converts deformation into electrical signal, and outputs standard 4~20 mA analog signal after signal processing to realize remote pressure monitoring.
Advantages & Highlights: High measurement precision; corrosion resistance for high-purity gas; fast response speed; good repeatability; fully sealed structure to prevent gas leakage.
Applicable Industries: Semiconductor manufacturing, photovoltaic equipment, vacuum coating industry, laboratory vacuum system, electronic material processing.
Installation Requirements: Install on vacuum pipeline or process gas pipeline; use matched sealing accessories; keep the sensor in horizontal installation state; avoid strong vibration installation positions.
Usage Notes: Only apply to specified gas media; prohibit exceeding maximum pressure resistance; regularly check thread and sealing ring for air leakage; calibrate pressure data periodically.
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