Description
Technical Specifications
- Input Voltage: 3-phase 480 V AC ±10%, 50/60 Hz
- Output Voltage: 0–480 V AC (phase-angle control)
- Output Current: 0–25 A (per phase)
- Control Mode: Phase angle, zero-crossing, PID temperature control
- Communication Interface: RS-485 (Modbus RTU)
- Power Supply: 24 V DC ±10% (control circuit)
- Operating Temperature: 0 °C ~ +50 °C
- Protection Class: IP20
- Dimensions (L×W×H): 400 mm × 350 mm × 150 mm
- Weight: 18 kg
Structural Features
Rack-mountable chassis, three-phase SCR power modules, built-in heat sink with cooling fan, front panel with digital display and control buttons, over-temperature and over-current protection circuits.
Functional Characteristics
Precise control of heating elements in semiconductor process chambers; adjusts AC power output via phase-angle modulation; supports closed-loop temperature control with external thermocouples/RTDs.
Working Principle
Uses silicon-controlled rectifiers (SCRs) to regulate the AC voltage supplied to heating loads; the control circuit adjusts the SCR firing angle based on temperature feedback, maintaining precise setpoint temperatures.
Material Composition
- Chassis: Cold-rolled steel sheet with electrostatic coating
- Heat Sink: High-purity aluminum alloy
- SCR Modules: Industrial-grade power semiconductors
- Control Board: FR-4 PCB with gold-plated contacts
Advantages & Highlights
Precise power regulation, fast response to temperature changes, multiple control modes, comprehensive protection mechanisms, compatibility with AMAT chamber heating systems, long-term reliability.
Applicable Industries
Semiconductor wafer processing (diffusion, annealing), industrial furnace control, precision heating systems, chemical processing, pharmaceutical manufacturing.
Installation Requirements
- Install in a standard 19-inch rack with vertical orientation.
- Reserve 150 mm clearance above/below for cooling airflow.
- Use appropriate gauge wires for power connections.
- Ensure reliable grounding (ground resistance ≤ 4 Ω).
Usage Notes
- Operate only within the rated voltage/current range.
- Keep the cooling fan and heat sink clean to prevent overheating.
- Allow a 20-minute warm-up period before full-load operation.
- Do not open the chassis while powered on.
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