ADVANCED ENERGY APEX3013 3156114-746

Description

Technical Specifications:

• Model: APEX 3013
• Part Number: 3156114-746
• Output Frequency: 13.56 MHz (standard ISM band)
• Output Power Range: 0–3000 W (continuous)
• Power Stability: ±0.5% over 8-hour period at full power
• Frequency Stability: ±0.05%
• Impedance Range: 10–2000 Ohms (automatic matching)
• Matching Network: Fully automatic, 100 ms tuning time
• Harmonics: < -40 dBc (typical at full power)
• Reflected Power Tolerance: Up to 100% reflected power without damage
• Cooling: Forced air, front-to-back airflow
• Input Power: 200–240 VAC, single phase, 50/60 Hz
• Dimensions (W×H×D): 482.6 mm × 177.8 mm × 546.1 mm (19″ × 7″ × 21.5″)
• Weight: 22.7 kg (50 lbs)
• Communication: RS-232, RS-485, Ethernet, analog 0–10 V control
• Safety: CE, UL, CSA certified; IEC 61010-1 compliant

Functional Features:

• Self-oscillating topology — no external oscillator required
• Built-in automatic impedance matching network (no external matchbox)
• Fast plasma ignition with adjustable ignition sequence
• Arc detection and shutdown within 2 μs
• Soft-start capability to reduce inrush current
• Real-time forward/reflected power monitoring
• Multi-unit synchronization capability via Ethernet

Structural Characteristics:

• Chassis: 19-inch rack-mountable, 7U height
• Enclosure: Powder-coated steel, ventilation slots on front and rear
• Connectors: N-type RF output (50 Ohm), DB-9 serial, RJ-45 Ethernet, BNC analog control
• Internal components: PCB-mounted with conformal coating for environmental protection

Working Principle: The APEX 3013 uses a self-oscillating Class E or Class D RF amplifier topology. The output tank circuit determines the oscillation frequency at 13.56 MHz. The automatic matching network uses variable capacitors and relay-switched inductors to transform the plasma load impedance to 50 Ohms at the output. Forward and reflected power are measured via directional couplers, and the control loop adjusts the matching network in real time. Arc detection compares forward and reflected power; a sudden impedance collapse triggers immediate RF shutdown.

Advantages:

• Eliminates need for external matchbox — reduces system cost and footprint
• Extremely fast arc detection protects substrates and electrodes
• Self-oscillating design provides inherent frequency stability
• Remote monitoring and control via Ethernet
• Field-proven in high-volume semiconductor manufacturing

Applicable Industries: Semiconductor fabrication, MEMS manufacturing, flat panel display production, solar cell manufacturing, research laboratories

Installation Requirements:

• 19-inch rack space: 7U minimum, with adequate rear ventilation clearance (minimum 150 mm)
• Input power: Dedicated 20 A circuit at 230 VAC recommended
• RF ground: Solid ground connection required, < 1 Ohm to facility ground
• Cooling air: Ambient temperature 0–40°C, max altitude 2000 m
• RF cable: 50 Ohm coaxial cable, N-type connectors, minimum 2 m recommended length

Usage Precautions:

• Do not operate with output port open or shorted without internal protection active
• Allow 5-minute warm-up before full-power operation
• Clean air filters every 3 months in dusty environments
• Do not block ventilation slots
• Service by qualified technicians only — high voltage present internally (up to 800 VDC bus)