Description
Technical Specifications
- Frequency Range: 13.56 MHz ±50 ppm
- Power Handling: 5 kW (continuous), 8 kW (peak)
- Impedance Matching: 50 Ω (load), adjustable 0–100 Ω
- Tuning Range: Capacitive: 10–1000 pF; Inductive: 50–500 nH
- Response Time: <50 ms (automatic tuning)
- Operating Voltage: 208 V AC ±10%, 50/60 Hz
- Operating Temperature: 10 °C ~ +45 °C
- Protection Class: IP20
- Dimensions (L×W×H): 450 mm × 380 mm × 200 mm
- Weight: 22 kg
Structural Features
Rack-mountable enclosure, high-Q variable vacuum capacitors, air-core inductors, built-in directional coupler for power monitoring, PID control circuit for automatic tuning.
Functional Characteristics
Matches the impedance between the RF power supply and plasma load in semiconductor processes; ensures maximum power transfer and minimizes reflected power; supports both manual and automatic tuning modes.
Working Principle
Detects forward and reflected power via the directional coupler; the control circuit adjusts the capacitance/inductance values in real time to achieve 50 Ω impedance matching; maintains optimal power delivery under varying plasma conditions.
Material Composition
- Enclosure: Stainless steel with anti-corrosion coating
- Capacitors: High-vacuum ceramic with copper electrodes
- Inductors: Litz wire wound on Teflon cores
- Control Board: FR-4 PCB with gold-plated contacts
Advantages & Highlights
Fast automatic tuning, low reflected power (<1% of forward power), high power handling capability, stable performance in plasma environments, compatibility with AMAT PECVD/etching systems.
Applicable Industries
Semiconductor wafer processing (PECVD, RIE, sputtering), plasma etching, thin-film deposition, solar cell manufacturing, RF plasma research.
Installation Requirements
- Install in a standard 19-inch rack near the RF power supply.
- Use low-loss 50 Ω coaxial cables for RF connections.
- Keep the enclosure dry and free of dust.
- Ensure reliable grounding to minimize RF interference.
Usage Notes
- Do not operate without a proper RF load connected.
- Allow a 15-minute warm-up period before high-power operation.
- Periodically check cable connections for tightness.
- Keep the internal components clean to prevent arcing.
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