AMAT 0100-09123

Description

Functional Features

• High-Precision Measurement: The sensor board provides accurate and reliable measurements of wafer temperature and other parameters, ensuring optimal process control.
• Fast Response Time: Designed to respond quickly to changes in wafer conditions, enabling real-time monitoring and adjustments.
• Durable Design: Built to withstand the harsh conditions of semiconductor manufacturing environments, ensuring long-term reliability and stability.
• Ethernet Interface: Facilitates easy integration with existing control systems and enables remote monitoring and data acquisition.

Application Scenarios
The AMAT 0100-09123 wafer sensor board is widely used in the following semiconductor manufacturing processes:

• Diffusion: Monitors wafer temperature during the diffusion process, ensuring uniform doping and optimal device performance.
• Etching: Provides real-time temperature feedback during etching processes, helping to control etch rates and achieve precise patterning.
• Deposition: Measures wafer temperature during thin-film deposition processes, ensuring consistent film thickness and quality.
• Annealing: Monitors temperature during annealing processes, which are critical for activating dopants and repairing crystal damage.
• Cleaning: Assists in controlling cleaning processes by monitoring wafer temperature, ensuring effective removal of contaminants without damaging the wafer surface.