Product Short Description

1. Technical Specifications
• Architecture: 6U VME dual-axis interferometric measurement board
• Laser source: 633 nm Helium-Neon, frequency-stabilized
• Resolution: < 1 nm (displacement), 0.1 nm typical
• Measurement range: ±5 mm to ±50 mm per axis (mirror dependent)
• Data rate: up to 7.7 MHz P2-bus; 2 MHz internal sampling
• Position format: 36-bit two’s complement
• Velocity format: 32-bit two’s complement
• Time resolution: 25 ns
• Power: +5 V ±5 % @ 3.5 A, +12 V ±10 % @ 0.1 A
• Interfaces: VME C.1 (A16/A24, D16/D32), ISA P2 for daisy-chaining
• Dimensions: 229 mm × 114 mm × 29 mm, mass 1.2 kg
• Operating temperature: 0 °C to +40 °C
• Protection: IP54, forced-air cooling recommended

Description

2. Functional Highlights
• Simultaneous dual-axis displacement, velocity and acceleration measurement
• Fiber-optic reference and measurement paths for EMI immunity
• Real-time PLL/DLL error monitoring, signal-loss, blink and power-down flags
• Daisy-chain capability—up to 16 axes on a single servo card
• Hot-swappable on VME backplane; software programmable via register set
• Compatible with ZMI 2000 series controllers and ZYGO MetroPro software
3. Application Scenarios
• Semiconductor wafer stage metrology and lithography reticle positioning
• Optical component surface figure and thickness mapping
• Ultra-precision diamond turning and CNC feedback loops
• Data-storage head slider flying-height testing
• Large telescope primary mirror alignment and active optics
• Research-grade interferometric calibration of nanopositioning stages
4. Integration & Expansion
• Plugs directly into 6U VME chassis; occupies one slot
• P2 connector enables cascade of multiple boards for multi-axis systems
• VME interrupts and DMA transfers supported for low-latency control loops
• Optional ISA adapter for legacy PC integration
• Firmware updates via CompactFlash or remote Ethernet loader
5. Ordering Package
• ZMI-2002 8020-0211-1-J measurement board
• 633 nm fiber-coupled interferometer heads (customer-selected throw)
• VME back-plane terminators and P2 ribbon cables
• MetroPro acquisition and analysis software license
• Calibration certificate traceable to NIST

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