Product Short Description
Product Name: CPCI-3720CF 3U CompactPCI Single Board Computer (SBC), also referenced as AS03720-23 / MKS-TENTA CPCI-3720CF.
Product Introduction: High-reliability industrial embedded computer designed by Applied Materials as the primary host/processing controller for 300 mm semiconductor manufacturing tools (CMP, PECVD, etch, deposition, robotics). Built on 3U CompactPCI form factor for vibration-resistant, fanless cleanroom operation.
Description
Technical Specifications:
- Form Factor: 3U CompactPCI (cPCI)
- Processor: Industrial-grade low-power x86 class CPU (commonly Intel Celeron J1900-class 4-core, 2.0/2.42 GHz in equivalent boards)
- Memory: DDR-class onboard RAM (varies by build, typically 2–8 GB)
- Storage: Onboard CompactFlash slot for bootable industrial OS (VxWorks / Windows Embedded)
- Networking: 10/100/1000Base-TX Ethernet (Intel 82574L-class controller, dual port on related builds)
- Serial: Multiple RS-232 ports (up to 6, some selectable RS-485/422)
- Digital I/O: 8-bit GPIO header
- Power Input: 9–36 V DC (cPCI backplane 5 V/3.3 V aux)
- Dimensions: Approx. 210 × 150 × 65 mm (board-level)
- Operating Temperature: 0 °C to 60 °C (cleanroom-controlled enclosure); storage -45 °C to 85 °C
- Humidity: 5 %–75 % non-condensing
Functional Features:
- Fanless passive heatsink thermal design eliminates particle generation
- High signal integrity near RF/plasma sources
- Real-time logic execution for wafer sequencing, robot trajectory, vacuum interlock
- Hot-swappable within cPCI chassis backplane architecture
- EEPROM/CompactFlash based non-volatile configuration
Application Scenarios: AMAT Reflexion LK/LK Prime CMP, Producer GT/SE PECVD/SACVD, Centura AP etch/thermal, Endura 2 deposition robotics and vacuum safety control.
Structure & Material: FR4 multilayer PCB, aluminum heatsink bracket, gold-finger cPCI edge connector, steel mounting brackets.
Working Principle: Runs real-time or embedded OS from CompactFlash; communicates with I/O cards, DeviceNet scanners, serial interfaces and interlock modules over cPCI backplane and Ethernet; executes tool control recipes and safety interlocks.
Installation Requirements: Seat into 3U cPCI chassis slot, secure front panel, connect backplane power and buses, boot from CF image matched to tool software revision.
Usage Notes: Do not mix firmware revisions across redundant hosts; keep CF image backed up; avoid commercial-grade RAM upgrades; verify ESD handling when servicing.
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