Product Short Description
Product Name: Series 65 electro-pneumatic pendulum control and isolation valve
Product Introduction: A high-vacuum throttle/isolation valve where a pivoting pendulum plate varies conductance for chamber pressure control and also provides leak-tight shutoff, used as process pressure regulator in semiconductor vacuum chambers.
Description
Technical Specifications:
- Valve type: Pendulum (swivel plate) control + isolation gate, Series 65
- Actuation: Electro-pneumatic drive, stepper motor + encoder position feedback, integrated controller with PID
- Body: Vacuum-grade stainless steel, elastomer/Viton seals (cleanroom options)
- Pressure range: High vacuum to atmosphere
- Temp range: +15 to +80 °C standard (heated versions to 120/200 °C)
- Flange: NW/ISO/CF high-vacuum ports, DN configurable
- Leak rate: Helium leak-tight to 1×10⁻⁹ mbar·l/s closed
- Interfaces: RS232, analog I/O, optional DeviceNet/EtherCAT/Profibus
- Dimensions: ~320 × 330 × 300 mm, weight ~12.8 kg
Functional Features: Microtorr-level pressure control, adaptive PID with auto-learn, fast swing response, combined throttle and gate function, integrated position controller, cleanroom-compatible materials.
Application Scenarios: PVD/CVD chamber pressure control, etch chamber throttle, load-lock isolation, vacuum coaters, research beam-line gates.
Working Principle: A stepper-driven pendulum plate tilts inside the bore; the controller reads encoder position and chamber gauge, computes PID output, and swings the plate to set conductance so chamber pressure follows setpoint; spring-closed seal plus pneumatic lift provides hard isolation when fully shut.
Installation Requirements: Mount vertically or per flange orientation with CF/NW bolts torqued to spec, connect clean dry air for pneumatic lift, route encoder cable away from power, purge with N₂ before process gas, install only in particle-controlled environment.
Usage Notes: Never touch seat or O-ring with bare hands; perform helium leak check after installation; do not operate heated version without heater supply; valve plate must be learned (LEARN routine) once per chamber before auto mode.
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