Product Short Description
Product Name: Schumacher ATCS-15 Absolute™ Temperature Control System (Chemical Source Temperature Controller)
Product Introduction: The ATCS-15 is a microprocessor-based temperature control unit designed for accurate and stable temperature control of liquid source chemicals in semiconductor and CVD (Chemical Vapor Deposition) manufacturing processes. It controls chemical source temperatures with ±0.2 °C accuracy.
Description
Technical Specifications:
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Temperature Control Range: 10 °C to 90 °C (depending on model variant)
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Standard Model: 10 °C to 60 °C
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High-Temperature Model: 40 °C to 90 °C
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Trans-LC Model: 10 °C to 22 °C
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Temperature Accuracy: ±0.2 °C of setpoint
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Temperature Stability: ±0.1 °C
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Readout Resolution: 0.1 °C
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Standard Temp Cutout: 70 °C
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Trans-LC Cutout: 50 °C
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High-Temp Cutout: 110 °C
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Container Capacity: 1500 cc quartz OR 1.2 liter stainless steel
Material Composition & Structure:
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Container Options: 1500 cc quartz bubbler or 1.2 L stainless steel container
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Stainless steel versions incorporate level sense and integrated lid heater
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Removable source cup permits safe container installation from the front
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Modular design for easy installation and maintenance
Functional Features:
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Microprocessor-based control circuitry for accurate and stable temperature control
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Electronic and visual (sight glass) level sense for monitoring chemical levels
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Full range of safety interlocks
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DDC interface for remote control and monitoring
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Trans-LC version eliminates all spark sources and reduces over-temperature cutout interlock
Application Scenarios:
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CVD source chemicals: TEOS, ZTOMCATS®, LTO-410™, TMB, TMPI
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Diffusion & oxide passivation: Trans-LC, TCA, POCl₃, PBr₃, BBr₃
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Semiconductor manufacturing process control
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Serves as temperature controller for the VMDOT™ Delivery System
Installation Requirements: Modular design allows for easy installation. The removable source cup enables safe container installation from the front of the unit. Stainless steel versions include integrated lid heater and level sensing.
Usage Precautions: Full range of safety interlocks must be verified before operation. The Trans-LC version is specifically designed to eliminate spark sources for hazardous chemical environments. Proper DDC interface configuration required for remote monitoring.
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