Product Short Description
Overview:
The ZYGO 7702 (Part Number BH5-6314) is a high-performance helium-neon (HeNe) dual-frequency laser head manufactured by ZYGO Corporation. It serves as the core light source for ZYGO interferometer systems and ZMI-series displacement measurement platforms, providing a stable laser reference for nano-scale position metrology. The unit uses orthogonal linear polarization dual-frequency output with Acousto-Optical Modulator (AOM) beam splitting.
Description
Technical Specifications:
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Laser Type: HeNe, continuous-wave, dual-frequency
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Nominal Wavelength: 632.8 nm (visible light)
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Output Power: > 400 µW (some configurations > 650 µW)
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Beam Diameter: 3 mm or 6 mm (configurable)
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Frequency Difference: 20 MHz ± 1,600 Hz (AOM)
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Wavelength Stability: 0.01 ppm / 24 hours
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Beam Pointing Stability: < 0.5 arc sec / °C
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Start-up Time: Typical < 10 s, maximum 70 s
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Supply Voltage: 24 VDC
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Power Consumption: Maximum 27 W
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Cooling Method: Forced-air cooling
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Operating Temperature: 10 °C to 30 °C
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Storage Temperature: -40 °C to 75 °C
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Approximate Dimensions: 250 × 150 × 100 mm
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Weight: Approx. 5.5 kg
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Laser Class: Class II
Key Features:
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Ultra-high wavelength stability (0.01 ppm/24 h) for nanometer-level displacement measurement
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Fast start-up (< 10 s typical) for rapid deployment
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Dual-axis frequency differential interferometry cancels environmental air-refractive-index and thermal drift errors
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Compatible with ZMI 2400, 4004, 4104 series measurement boards
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Single head drives multiple measurement axes, improving system integration efficiency
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Industrial-grade reliability for 24/7 continuous operation
Working Principle:
The laser head generates two orthogonally polarized frequencies separated by 20 MHz. During measurement, the frequency difference is used for differential interferometric comparison, effectively compensating for errors caused by ambient air refractive index variations and temperature fluctuations.
Application Scenarios:
Semiconductor manufacturing (wafer inspection, lithography positioning), precision CNC machine tools, national metrology laboratories, optical inspection equipment, and high-precision dimensional inspection in automotive and electronics assembly.
Installation & Notes:
Install in a clean, vibration-damped environment within 10–30 °C. Ensure 24 VDC supply with adequate current margin. Avoid mechanical shock during handling; the HeNe tube is sensitive to severe impact.
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