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Maximum Flow Rate: 100 slpm
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Leak Rate: < 1×10⁻⁹ mbar·L/s
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Response Time: < 10 ms
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Port Interface: CF (ConFlat) flange
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Actuation: Manual or pneumatic
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Key Performance Advantages: High flow even at elevated pressure, ultra-low leakage ensuring vacuum integrity, rapid response for precise flow control
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Configuration Options: Multiple stem/seal configurations to match varied application needs
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Application Scenarios:
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Semiconductor manufacturing: gas distribution, vacuum systems, etch processes
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Analytical instruments: gas analysis, mass spectrometry vacuum systems
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Optical coating: gas distribution and vacuum control
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R&D vacuum/gas control setups
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Usage Notes: For pneumatic actuation, supply clean dry instrument air; verify CF flange torque specs during installation to maintain < 10⁻⁹ mbar·L/s leak integrity.
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