Description
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Accuracy: ±0.25 % Full Scale
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Power Supply: 9–30 VDC
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Operating Temperature: -40 °C to +85 °C
Interpretation B — Type 683 Exhaust Throttle Control Valve
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Valve Type: Motorized exhaust throttle butterfly valve for vacuum chamber pressure control
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Control Signal: 0–10 VDC setpoint input
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Position Feedback: 0–10 VDC analog output
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Power Supply: 24 VDC, ~15 W
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Repeatability: ±0.1 % FS
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Vacuum Range: 10⁻³ Torr – 1000 Torr
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Body Material: 316L stainless steel, fluoro-rubber seal
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Full-stroke Time: < 1.5 s
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Protection: IP54 on actuator head
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Fault Relay: Servo overload / encoder break / power loss → interlock trip
Common to both:
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Application: Semiconductor etch, thin-film deposition, vacuum coating, photovoltaic equipment
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Usage Notes: Verify which variant your BOM calls for before ordering — the sensor module and the throttle valve share the same 683B-24883 designation in different MKS catalogs.
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