Product Short Description
Product Name: T3B High-Speed Exhaust Throttle Valve
Product Overview:
The T3BIB-29916 is a high-precision direct-drive throttle valve manufactured by MKS Instruments, designed for vacuum and pressure regulation in semiconductor and industrial process environments. It integrates a stepper motor drive, position encoder feedback and built-in control logic for closed-loop pressure control.
Description
- Supply Voltage: 24 VDC
- Nominal Port Size: 1/2 inch
- Control Accuracy: 0.25% of setpoint or 5 mV (whichever greater)
- Response Time: Less than 10 ms
- Repeatability: <0.1% FS
- Maximum Working Pressure: 1000 psi
- Valve Body Operating Temperature: 0°C ~ 105°C; Optional heating up to 150°C
- Electronics Operating Temperature: 0°C ~ 40°C
- Storage Temperature: -20°C ~ 80°C
- Communication Interfaces: RS-485, DeviceNet
Function Features:
- Closed-loop encoder-based valve position feedback
- Self-tuning pressure control algorithm with minimal overshoot
- Manual override for valve opening and closing
- Real-time monitoring of valve cycle counts and operation hours
- Supports dual pressure transducer input
- Built-in alarm relay outputs for process threshold triggers
Application Scenarios:
Semiconductor CVD, RTP, vacuum exhaust control, industrial gas distribution, precision vacuum processing, chemical low-pressure reaction systems.
Material Composition:
- Valve Body: 316 Stainless Steel
- Standard Sealing: Viton; Optional Kalrez / Chemraz seals for special process media
Structural Characteristics:
Compact integrated structure combining motor, drive circuit and throttling orifice. Direct-drive mechanical structure without intermediate gear in high-speed version. Standard ISO flange connection interface.
Working Principle:
The built-in stepper motor directly adjusts the throttle orifice opening. The position encoder feeds back valve opening data to the internal controller. The control unit compares the measured process pressure with setpoint and continuously adjusts orifice area to stabilize system pressure.
Installation Requirements:
Mount vertically or horizontally without mechanical stress on piping. Ensure clean, dry process gas supply. Use matched flange gaskets. Reserve cooling space for drive electronics.
Usage Notes:
Purge the valve completely before startup or disassembly. Do not exceed maximum rated working pressure. Prevent particulate contamination entering the flow path. Not suitable for explosive atmosphere without additional protection. Select compatible sealing materials according to process gas composition.
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