Description
Product Brief Introduction
Stepper motor-driven precision needle regulating valve for high-vacuum system gas flow and pressure closed-loop control, matched with Pfeiffer RVC300 PID vacuum controller. Achieves ultra-wide range continuous gas conductance adjustment via precise valve needle stroke control, compatible with high vacuum and ultra-high vacuum process equipment, meets semiconductor coating, analytical instrument and laboratory vacuum process high precision pressure control requirements.
Core Technical Specifications
- Drive Power Supply: 24 V DC ±10% operating voltage, maximum power consumption 12 VA
- Actuator Drive: Integrated closed-loop stepper motor drive electronics
- Valve Stroke: 11.5 mm full needle travel
- Opening/Closing Time: 4 seconds full open; 3 seconds full close
- Connection Flange Standard: DN16 ISO-KF standard vacuum flange (inlet & outlet dual DN16 interface)
- Controllable Gas Flow Range: Minimum 5×10⁻⁶ mbar·l/s; Maximum 1250 mbar·l/s (with inlet filter installed)
- Operating Absolute Pressure Range: 1×10⁻⁸ mbar ~ 2.5 bar
- Internal Leak Tightness: 1×10⁻⁹ mbar·l/s helium leak rate
- Ambient Operating Temperature: 5°C ~ +40°C
- Bakeout Temperature Limit: Valve housing maximum 80°C; actuator maximum 60°C
- Degree of Protection: IP40 actuator housing
- Net Weight: 0.75 kg
- Control Signal Modes: Analog 0–10V DC voltage mode; digital serial command mode via RS232 interface
Function Features
- Ultra-wide dynamic range gas flow adjustment, realize high-precision upstream gas dosing and downstream conductance throttling two control modes
- Three built-in position feedback sensors: valve full open, full closed, needle moving state real-time signal output
- Dual control mode support: analog voltage continuous proportional adjustment, digital serial precise step positioning control
- Integrated stainless steel inlet particle filter to prevent process particle contamination blocking valve needle
- FKM fluoropolymer valve sealing element, compatible with most inert and non-corrosive process gases
- Serial communication command set supports remote automatic program control via industrial PLC
- Fail-safe mechanical design: no self-locking when power loss, valve maintains current opening position without automatic full close/open
Performance Parameters
- Control Position Resolution: 0.01mm needle stroke per control step
- Pressure Control Stability Deviation: ±0.1% FS under PID closed-loop control with RVC300 controller
- Dead Volume Inside Valve Body: 0.03 cm³ minimal dead volume for fast vacuum response
- Service Life Cycle: Minimum 1 million full open-close stroke cycles without sealing performance degradation
Material Composition
- Valve Housing Body: Stainless steel 1.4435 (316L medical grade low carbon stainless steel)
- Regulating Needle & Valve Seat: Stainless steel 1.4301
- Internal Filter Element: Sintered stainless steel mesh filter
- Sealing Gasket: FKM fluorocarbon rubber (fluorplastomer dosing sleeve)
- Actuator Housing: Aluminum alloy with anodic oxidation anti-corrosion coating
Structural Characteristics
- Split two-part structure: front stainless steel vacuum valve body, rear integrated stepper motor actuator unit
- Standard DN16 ISO-KF quick-release vacuum flange interface for fast pipeline assembly/disassembly
- Side-mounted electrical wiring terminal connector for control signal and power supply wiring
- Internal anti-vibration needle guiding sleeve, eliminates needle shaking during flow regulation
Working Principle
24V DC power supply energizes integrated stepper motor drive circuit; analog 0–10V DC or digital serial commands convert to precise stepper motor rotation steps, driving linear transmission mechanism to push/pull stainless steel regulating needle; needle stroke change adjusts annular flow gap between needle and valve seat to continuously change gas flow conductance; three built-in limit sensors feed back needle full open/closed/moving state signals to vacuum controller; under closed-loop PID control with vacuum gauge feedback signal, the valve automatically adjusts needle opening to stabilize vacuum chamber internal pressure at set target value.
Advantage Highlights
- Minimal internal dead volume ensures ultra-fast vacuum pressure response for precision laboratory and semiconductor processes
- Ultra-wide flow adjustment range covers high vacuum rough throttling and ultra-fine micro gas dosing applications
- 316L stainless steel valve body with low helium leak rate meets UHV ultra-high vacuum cleanliness requirements
- Dual analog/digital control modes compatible with all mainstream industrial vacuum control systems
- Integrated inlet filter avoids on-site additional filter installation, reduces pipeline layout complexity
Applicable Industries
Semiconductor thin film deposition equipment, electron microscope vacuum systems, mass spectrometry analytical instruments, laboratory research vacuum furnaces, solar cell coating production lines, optical coating vacuum machines
Installation Requirements
- Arbitrary mounting orientation allowed, gas flow direction strictly follow arrow mark printed on valve housing
- DN16 ISO-KF flange connection equipped with copper centering ring and FKM vacuum sealing gasket
- Control wiring uses shielded twisted pair cable, shielding layer single-point grounded at controller side
- Maintain ambient temperature below 40°C, external heat source cannot directly radiate actuator part
- Bakeout heating only allowed on valve body section, heating temperature never exceed 80°C, actuator must be separated from heating zone
Usage Precautions
- Strictly prohibited for liquid medium or condensable vapor process media, liquid condensation will permanently jam valve needle
- Regularly disassemble and clean sintered stainless steel filter every 3 months for particle-containing process gas
- Do not apply external mechanical impact force on actuator housing, will damage internal stepper motor transmission structure
- Do not bake the actuator unit, high temperature will degrade drive circuit electronic components
- Disconnect 24V DC power supply before disassembly maintenance to avoid needle accidental stroke movement injury
Reviews
There are no reviews yet.