MKS 979B-01-0013

Description

• Functional Features: Real-time monitoring of vacuum degree in equipment cavity; Convert vacuum pressure value into standard electrical signal output; Built-in circuit anti-interference and signal conditioning; Support remote data transmission.
• Performance Parameters: Measurement accuracy: ±0.5% FS; Working vacuum range: High vacuum grade; Operating temperature: 10°C ~ 60°C; Response time: ≤ 50 ms; Internal outgassing rate: Ultra-low for high-purity vacuum environment.
• Material Composition: Vacuum contact part: Electropolished 316L stainless steel; Sensing element: High-sensitivity vacuum sensor chip; Shell: Aluminum alloy with oxidation resistance treatment; Sealing parts: Vacuum special fluororubber.
• Structural Characteristics: Integrated sensing and signal processing structure; Compact vacuum connection structure; Internal fully sealed design to prevent air leakage; Detachable sensor assembly for easy maintenance.
• Working Principle: The built-in vacuum sensing element perceives the gas density and pressure change in the vacuum cavity, converts physical signals into electrical signals through the internal processing circuit, and outputs standard signals for system display, recording and linkage control.
• Advantages & Highlights: Ultra-low outgassing, suitable for high-purity vacuum process; High measurement stability in long-term continuous operation; Resistant to process gas corrosion; Compact structure, easy to integrate into vacuum equipment.
• Applicable Industries: Semiconductor manufacturing, Vacuum coating, Optical thin film deposition, Vacuum metallurgy, Analytical instrument, Aerospace vacuum test.
• Model Series: MKS 979B High-precision Vacuum Gauge Series
• Installation Requirements: Install in ultra-clean environment before assembly; Adopt standard vacuum flange connection; Complete air tightness test after installation; Keep the installation position away from airflow dead zone.
• Usage Notes: Prohibit exposure to atmospheric pressure for a long time under working state; Strictly prevent dust and pollutants from entering the vacuum channel; Calibrate measurement data regularly; Do not disassemble the sealed structure at will.