Product Short Description
Product Name: LAM Research Semiconductor Process Component 810-520659-001
Model Series: LAM 810 Series Semiconductor Core Parts
Product Brief: Environmental protection and sealing auxiliary component for LAM semiconductor process chamber, applied to internal sealing and gas isolation of process cavity.
Description
- Pressure Resistance: 0.8MPa maximum bearing air pressure
- Temperature Resistance: -10°C ~ 120°C long-term working temperature
- Sealing Clearance: Zero leakage under rated pressure
Functional Features: Process chamber gas sealing, isolation of internal and external gas flow, dust and particle isolation, anti-leakage protection for vacuum environment.
Performance Parameters:
- Sealing Service Life: 36 months rated service cycle
- Vacuum Adaptability: Adapt to 1×10⁻³ Pa vacuum working environment
- Chemical Resistance: Resist common semiconductor process gas corrosion
Material Composition: Perfluoroelastomer main sealing body, aluminum alloy compression ring, stainless steel fixing fastener, anti-static auxiliary gasket.
Structural Characteristics: Annular overall sealing structure, multi-lip combined sealing design, uniform compression stress structure, anti-static integrated structure.
Working Principle: Elastically deform under compression force to fill assembly gaps; isolate internal process gas and vacuum environment from external air; block tiny particles from entering process chamber.
Advantages & Highlights: Excellent high temperature and chemical resistance, zero air leakage, vacuum environment adaptability, anti-static, long sealing life, uniform compression stress without local deformation.
Applicable Industries: Semiconductor etching equipment, vacuum coating equipment, semiconductor process cavity supporting, microelectronics vacuum equipment.
Installation Requirements: Install in standard sealing groove of process chamber; ensure uniform compression force; keep sealing surface clean and scratch-free; install in dust-free Class 100 workshop environment.
Usage Notes: Replace in full set when damaged; prohibit using sharp tools to scratch sealing surface; inspect air tightness every 15 days; avoid contact with strong corrosive chemicals.
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