Product Short Description
- Product Name: Semiconductor Vacuum Pipeline Fitting
- Brief Introduction: Special connecting fitting for LAM equipment vacuum pipeline system, used for multi-section vacuum pipeline transition connection.
- Technical Specifications: Ultimate working vacuum 5×10⁻⁹ Torr, maximum bearing pressure 1.1 MPa, operating temperature -5 °C to 120 °C, connection caliber 6 mm.
Description
- Functional Features: Realizes vacuum pipeline turning, transition connection and pipeline stress relief; maintains overall vacuum tightness of pipeline system.
- Performance Parameters: Overall leakage rate ≤ 3×10⁻¹⁰ sccm/sec, fatigue resistance after long-term vibration ≥ 10⁶ cycles, sealing performance permanent under rated condition.
- Material Composition: Forged 316L stainless steel main body + all-metal sealing ring + stress relief flexible structure.
- Structural Characteristics: Composite bend structure, built-in flexible stress relief section, double sealing structure, standard vacuum flange interface.
- Working Principle: Connects different sections of vacuum pipeline, offsets mechanical stress and vibration between pipelines, and maintains long-term high vacuum state of the whole pipeline.
- Advantages: Excellent vacuum holding capability, vibration and stress resistance, all-metal structure no volatile substance, suitable for ultra-high vacuum environment.
- Applicable Industries: Semiconductor ultra-high vacuum process, vacuum etching, vacuum deposition, scientific research vacuum equipment.
- Series Information: LAM 810 Series Vacuum Pipeline Fittings, 015 is multi-functional transition joint model.
- Installation Requirements: Clean all sealing surfaces before assembly; install according to pipeline stress direction; strictly follow vacuum standard torque for fastening.
- Usage Precautions: Do not bear external heavy load on pipeline fittings; prohibit knocking and bending; conduct full vacuum leakage test after each disassembly and assembly.
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