Product Short Description
- Product Name: Semiconductor Equipment Gas Pipeline Component
- Brief Introduction: Precision pipeline connecting part for LAM semiconductor process gas delivery system, used for high-purity gas transmission.
- Technical Specifications: Design pressure 1.0 MPa, working vacuum 1×10⁻⁷ Torr, operating temperature 0 °C to 125 °C, pipeline inner diameter 4 mm.
Description
- Functional Features: Conveys high-purity process gas, realizes pipeline switching, flow guidance and sealing connection; adapts to multiple semiconductor process gases.
- Performance Parameters: Gas purity retention rate 99.999%, leakage rate ≤ 1×10⁻⁹ sccm/sec, service life ≥ 42,000 hours.
- Material Composition: Electropolished 316L stainless steel pipe body + PTFE sealing parts + high-purity alloy connectors.
- Structural Characteristics: Elbow integrated structure, internal smooth polishing, ferrule-type quick connection, full flow channel design without dead space.
- Working Principle: Transports high-purity process gas to semiconductor reaction chamber under controlled pressure, keeps pipeline internal clean and no residual gas.
- Advantages: Ultra-smooth inner wall no particle shedding, excellent high-purity gas adaptability, zero dead volume, reliable sealing performance.
- Applicable Industries: Semiconductor manufacturing, wafer processing, thin film deposition, electronic material production.
- Series Information: LAM 810 Series Process Gas Pipeline Components, 016 is special angle pipeline version.
- Installation Requirements: Complete pipeline assembly in cleanroom; use special ferrule fastening tool; do not bend the pipe body forcibly.
- Usage Precautions: Purge pipeline thoroughly before formal use; prohibit conveying corrosive super-strong medium; inspect joint tightness regularly.
Reviews
There are no reviews yet.