Product Short Description
AMAT Semiconductor Sensor Bracket Assembly 0100-77037
Product Brief
Integrated mounting bracket assembly for process sensors on AMAT semiconductor equipment. It fixes and positions various process monitoring sensors, ensuring stable installation and accurate signal collection of sensors inside process chambers.
Description
Model Series
AMAT 0100 Series Sensor Mounting & Fixture Parts
Technical Specifications
- Part Type: Sensor Fixed Bracket Assembly
- Applicable Environment: Vacuum, high temperature and plasma atmosphere
- Operating Temperature: -10 °C to 220 °C
- Positioning Tolerance: High-precision sensor positioning tolerance
- Load Capacity: Rated load for industrial process sensors
Functional Features
- Provides firm fixed support for process monitoring sensors
- Maintains accurate sensor installation position for stable signal acquisition
- Shields sensors from partial plasma and thermal interference
- Adapts to narrow internal space of semiconductor equipment
Performance Parameters
- Vibration Resistance: No position offset under equipment operation vibration
- Dimensional Stability: No deformation under high temperature
- Corrosion Resistance: Resist process gas erosion
- Installation Repeatability: Consistent positioning after disassembly and reassembly
Material Composition
- Bracket Main Body: High-strength lightweight aluminum alloy
- Anti-Corrosion Layer: Passivation surface treatment
- Insulating Parts: High-temperature resistant engineering plastic
- Fasteners: Anti-rust stainless steel
Structural Characteristics
- Multi-station integrated bracket structure for multiple sensors
- L-shaped and cantilever combined layout for space saving
- Precision positioning pins for fixed installation position
- Hollow structure for heat dissipation and weight reduction
Working Principle
Fixed inside the semiconductor process chamber as a dedicated carrier for monitoring sensors. It locks sensors at designated detection positions, avoids position shift caused by equipment operation, and ensures sensors continuously and accurately collect temperature, pressure and gas parameter signals.
Advantage Highlights
- Integrated design supports installation of multiple sensors simultaneously
- High structural rigidity prevents position drift in long-term operation
- High temperature and corrosion resistance adapts to harsh chamber environment
- Standard interface for quick assembly and disassembly
Applicable Industries
Semiconductor process monitoring, vacuum equipment sensing system, microelectronics production equipment
Installation Requirements
- Assemble in ultra-clean workshop, follow sensor position layout drawing
- Tighten fasteners uniformly to avoid bracket tilting
- Reserve sufficient space for sensor signal lines
- Verify sensor detection accuracy after installation
Usage Notes
- Do not apply external impact to the bracket during equipment maintenance
- Check fastening tightness regularly in routine inspection
- Prevent signal lines from being squeezed or worn
- Replace deformed or corroded brackets immediately
Reviews
There are no reviews yet.