Product Short Description
Product Name
Vacuum Pressure Controller / Precision Gas Pressure Regulator
Product Brief Introduction
Professional high-precision vacuum and gas pressure control component from MKS, used for accurate pressure regulation and monitoring in vacuum systems and gas delivery systems.
Description
Technical Specifications
- Model Series: 220DD Series
- Rated Pressure Range: 0 ~ 100 Torr
- Control Mode: Automatic closed-loop pressure control
- Operating Medium: Dry air, inert gas, industrial process gas
- Operating Temperature: 10 °C to 60 °C
Functional Features
Precision pressure regulation; real-time pressure feedback; automatic flow adjustment; system pressure stabilization; compatible with automated production lines.
Performance Parameters
- Control Accuracy: High precision pressure control for semiconductor and vacuum industry
- Response Speed: Fast pressure adjustment response
- Leakage Rate: Ultra-low internal leakage, meeting vacuum industry standards
Material Composition
Flow channel: Stainless steel 316L; Valve core: Special wear-resistant alloy; Housing: High-strength engineering polymer + metal framework; Sealing parts: Fluorine rubber.
Structural Characteristics
Integrated valve body + control circuit structure; straight-through flow channel design; built-in pressure sensing unit; compact integrated layout.
Working Principle
Adopt closed-loop feedback control: the internal pressure sensor detects real-time medium pressure, compares with set value, drives the regulating valve to adjust flow, so as to maintain system pressure within the set range.
Advantage Highlights
Ultra-high control precision; excellent vacuum tightness; corrosion resistance to various process gases; compact structure, easy system integration.
Applicable Industries
Semiconductor manufacturing, photovoltaic industry, vacuum coating, chemical gas delivery, laboratory precision instruments.
Model Series
MKS 220DD Precision Pressure Control Series
Installation Requirements
- Install in horizontal or vertical direction according to pipeline flow direction mark;
- Use matched pipeline connectors to ensure airtight connection;
- Install filter at the front end to prevent particle impurities from entering the flow channel;
- Keep the surrounding environment clean and dust-free.
Usage Notes
- Prohibit use for corrosive, viscous and particulate media;
- Do not exceed the rated pressure range for long-term operation;
- Regularly clean the internal flow channel and filter element;
- Avoid violent vibration during operation.
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